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Results:
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Results: 3
Identification and sizing of particle defects in semiconductor-wafer processing
Authors:
Yoo, SH Weygand, J Scherer, J Davis, L Liu, B Christenson, K Butterbaugh, J Narayanswami, N
Citation:
Sh. Yoo et al., Identification and sizing of particle defects in semiconductor-wafer processing, J VAC SCI B, 19(2), 2001, pp. 344-353
Estimation of contamination levels in a chemical recirculation system for semiconductor wafer processing
Authors:
Narayanswami, N
Citation:
N. Narayanswami, Estimation of contamination levels in a chemical recirculation system for semiconductor wafer processing, IEEE SEMIC, 13(1), 2000, pp. 10-15
A theoretical analysis of wafer cleaning using a cryogenic aerosol
Authors:
Narayanswami, N
Citation:
N. Narayanswami, A theoretical analysis of wafer cleaning using a cryogenic aerosol, J ELCHEM SO, 146(2), 1999, pp. 767-774
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