Authors: Freidhoff, CB Young, RM Sriram, S Braggins, TT O'Keefe, TW Adam, JD Nathanson, HC Syms, RRA Tate, TJ Ahmad, MM Taylor, S Tunstall, J

Citation: Cb. Freidhoff et al., Chemical sensing using nonoptical microelectromechanical systems, J VAC SCI A, 17(4), 1999, pp. 2300-2307