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Results: 1-2 |
Results: 2
Crystal surface defects and oxygen gettering in thermally oxidized bonded SOI wafers
Authors: Papakonstantinou, P Somasundram, K Cao, X Nevin, WA
Citation: P. Papakonstantinou et al., Crystal surface defects and oxygen gettering in thermally oxidized bonded SOI wafers, J ELCHEM SO, 148(2), 2001, pp. G36-G42
Material effects on stress-induced defect generation in trenched silicon-on-insulator structures
Authors: Nevin, WA Somasundram, K McCann, P Magee, S Paxton, AT
Citation: Wa. Nevin et al., Material effects on stress-induced defect generation in trenched silicon-on-insulator structures, J ELCHEM SO, 148(11), 2001, pp. G649-G654
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