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Results: 1
Effect of etchant concentration and defects on pyramid formation in TMAH etched silicon
Authors:
Choi, WK Thong, JTL Bai, Y Newaskar, P Luo, P
Citation:
Wk. Choi et al., Effect of etchant concentration and defects on pyramid formation in TMAH etched silicon, B MATER SCI, 22(3), 1999, pp. 615-621
Risultati:
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