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Results:
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Results: 1
Polymerization of dual ion beam deposited CNx films with increasing N content
Authors:
Ng, YM Ong, CW Zhao, XA Choy, CL
Citation:
Ym. Ng et al., Polymerization of dual ion beam deposited CNx films with increasing N content, J VAC SCI A, 17(2), 1999, pp. 584-592
Risultati:
1-1
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