Authors:
Nguyen, NV
Richter, CA
Cho, YJ
Alers, GB
Stirling, LA
Citation: Nv. Nguyen et al., Effects of high-temperature annealing on the dielectric function of Ta2O5 films observed by spectroscopic ellipsometry, APPL PHYS L, 77(19), 2000, pp. 3012-3014