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Results: 1
Ultrathin gate oxynitrides grown using fast ramp vertical furnace for sub-130 nanometer technology
Authors:
Lucas, A Gopalan, S Lee, JC Kaushal, S Niino, R Tada, Y
Citation:
A. Lucas et al., Ultrathin gate oxynitrides grown using fast ramp vertical furnace for sub-130 nanometer technology, EL SOLID ST, 3(8), 2000, pp. 389-391
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