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Results: 1
Implanted collector profile optimization in a SiGeHBT process
Authors:
Malm, BG Johansson, T Arnborg, T Norstrom, H Grahn, JV Ostling, M
Citation:
Bg. Malm et al., Implanted collector profile optimization in a SiGeHBT process, SOL ST ELEC, 45(3), 2001, pp. 399-404
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