Authors:
Torres, JL
Nounu, HN
Wasson, JR
Wolfe, JC
Lutz, J
Haugeneder, E
Loschner, H
Stengl, G
Kaesmaier, R
Citation: Jl. Torres et al., Experimental evaluation of an optimized radiation cooling geometry for ionprojection lithography masks, J VAC SCI B, 18(6), 2000, pp. 3207-3209