Authors: Torres, JL Nounu, HN Wasson, JR Wolfe, JC Lutz, J Haugeneder, E Loschner, H Stengl, G Kaesmaier, R

Citation: Jl. Torres et al., Experimental evaluation of an optimized radiation cooling geometry for ionprojection lithography masks, J VAC SCI B, 18(6), 2000, pp. 3207-3209