Authors:
OGUSHI S
SADAMITSU S
MARSDEN K
KOIKE Y
SANO M
Citation: S. Ogushi et al., GETTERING CHARACTERISTICS OF HEAVY-METAL IMPURITIES IN SILICON-WAFERSWITH POLYSILICON BACK SEAL AND INTERNAL GETTERING, JPN J A P 1, 36(11), 1997, pp. 6601-6606
Authors:
MIYAZAKI M
MIYAZAKI S
OGUSHI S
OCHIAI T
SANO M
SHIGEMATSU T
Citation: M. Miyazaki et al., EFFICIENCY OF BORON GETTERING FOR IRON IMPURITIES IN P P(+) EPITAXIALSILICON-WAFERS/, JPN J A P 2, 36(4A), 1997, pp. 380-381