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Results: 1
DEVELOPMENT OF A SI C DIFFUSION BARRIER LAYER BASED ON THE MO-SI-C-N SYSTEM/
Authors:
GOVINDARAJAN S MOORE JJ OHNO TGT
Citation:
S. Govindarajan et al., DEVELOPMENT OF A SI C DIFFUSION BARRIER LAYER BASED ON THE MO-SI-C-N SYSTEM/, Surface & coatings technology, 94-5(1-3), 1997, pp. 7-12
Risultati:
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