Authors: ICHIKAWA R HATA M OKIMOTO N OIKAWAHANDA S TSUDA M

Citation: R. Ichikawa et al., ACID-CATALYZED DEPROTECTION MECHANISM OF TERT-BUTYLOXYCARBONYLOXY POLYMERS IN CHEMICALLY AMPLIFIED RESISTS, Journal of polymer science. Part A, Polymer chemistry, 36(7), 1998, pp. 1035-1042