Citation: S. Ikeda et al., CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPE STUDIES ON INTRINSICBREAKDOWN SPOTS OF THIN GATE OXIDES, JPN J A P 1, 36(5A), 1997, pp. 2561-2564
Citation: M. Okihara et al., EFFECT OF STRESS ON OXIDE EDGE SHAPE OF LOCAL OXIDATION OF SILICON FOR VARIOUS OXIDATION TEMPERATURES, JPN J A P 1, 34(4A), 1995, pp. 1822-1826
Authors:
OKIHARA M
HIRASHITA N
HASHIMOTO K
ONODA H
Citation: M. Okihara et al., TRANSMISSION ELECTRON-MICROSCOPY OBSERVATION OF INTERFACIAL REACTIONSIN HIGH-TEMPERATURE SPUTTERED AL ALLOY TIN SYSTEM/, Applied physics letters, 66(11), 1995, pp. 1328-1330