Citation: He. Oneal et al., KINETICS OF SILYLENE INSERTION INTO N-H BONDS AND THE MECHANISM AND KINETICS OF THE PYROLYSIS OF DIMETHYLSILYLAMINE, The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory, 102(44), 1998, pp. 8493-8497
Citation: Kl. Walker et al., MECHANISMS AND KINETICS OF THE THERMAL DECOMPOSITIONS OF TRICHLOROSILANE, DISCHLOROSILANE, AND MONOCHLOROSILANE, International journal of chemical kinetics, 30(1), 1998, pp. 69-88
Citation: Ma. Ring et al., KINETICS OF DICHLOROSILYLENE TRAPPING BY METHANE AND MECHANISM AND KINETICS OF THE METHYLDICHLOROSILANE DECOMPOSITION, International journal of chemical kinetics, 30(1), 1998, pp. 89-97
Citation: He. Oneal et al., PRIMARY REACTION CHANNELS AND KINETICS OF THE THERMAL-DECOMPOSITION OF PHENYLSILANE, Journal of physical chemistry, 99(23), 1995, pp. 9397-9402
Authors:
MARTIN JG
ONEAL HE
RING MA
ROBERTS DA
HOCHBERG AK
Citation: Jg. Martin et al., MECHANISMS OF SILICON DIOXIDE DEPOSITION FROM THE LOW-PRESSURE CHEMICAL-VAPOR-DEPOSITION OF DIETHYLSILANE OXYGEN MIXTURES, Journal of the Electrochemical Society, 142(11), 1995, pp. 3873-3880