Authors: CRACIUN V BOYD IW READER AH KERSTEN WJ HAKKENS FJG OOSTING PH VANDENHOUDT DEW

Citation: V. Craciun et al., MICROSTRUCTURE OF OXIDIZED LAYERS FORMED BY THE LOW-TEMPERATURE ULTRAVIOLET-ASSISTED DRY OXIDATION OF STRAINED SI0.8GE0.2 LAYERS ON SI, Journal of applied physics, 75(4), 1994, pp. 1972-1976