Authors: GREGUS JA GREEN CA YOON E OSTERMAYER FW HAYES TR PAWELEK R GOTTSCHO RA SOHAIL S NAQVI H

Citation: Ja. Gregus et al., REAL-TIME LATENT IMAGE MONITORING DURING HOLOGRAPHIC FABRICATION OF SUBMICRON DIFFRACTION GRATINGS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2468-2472