Authors: RODRIGUEZNAVARRO A OTANORIVERA W PILIONE LJ MESSIER R GARCIARUIZ JM

Citation: A. Rodrigueznavarro et al., CONTROL OF THE PREFERRED ORIENTATION OF ALN THIN-FILMS BY COLLIMATED SPUTTERING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(3), 1998, pp. 1244-1246

Authors: OTANORIVERA W PILIONE LJ ZAPIEN JA MESSIER R

Citation: W. Otanorivera et al., CUBIC BORON-NITRIDE THIN-FILM DEPOSITION BY UNBALANCED MAGNETRON SPUTTERING AND DC PULSED SUBSTRATE BIASING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(3), 1998, pp. 1331-1335

Authors: OTANORIVERA W PILIONE LJ MESSIER R

Citation: W. Otanorivera et al., PRESSURE-DEPENDENCE OF THE NEGATIVE BIAS VOLTAGE FOR STABILIZATION OFCUBIC BORON-NITRIDE THIN-FILMS DEPOSITED BY SPUTTERING, Applied physics letters, 72(20), 1998, pp. 2523-2525

Authors: RODRIGUEZNAVARRO A OTANORIVERA W GARCIARUIZ JM MESSIER R PILIONE LJ

Citation: A. Rodrigueznavarro et al., PREPARATION OF HIGHLY ORIENTED POLYCRYSTALLINE ALN THIN-FILMS DEPOSITED ON GLASS AT OBLIQUE-ANGLE INCIDENCE, Journal of materials research, 12(7), 1997, pp. 1689-1692

Authors: RODRIGUEZNAVARRO A OTANORIVERA W GARCIARUIZ JM MESSIER R PILIONE LJ

Citation: A. Rodrigueznavarro et al., DEVELOPMENT OF PREFERRED ORIENTATION IN POLYCRYSTALLINE ALN THIN-FILMS DEPOSITED BY RF-SPUTTERING SYSTEM AT LOW-TEMPERATURE, Journal of materials research, 12(7), 1997, pp. 1850-1855