Citation: G. Oversluizen et Whm. Lodders, OPTIMIZATION OF PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION OF HYDROGENATED AMORPHOUS-SILICON, Journal of applied physics, 83(12), 1998, pp. 8002-8009
Authors:
OVERSLUIZEN G
LODDERS WHM
JOHNSON MT
VANDERPUT AA
Citation: G. Oversluizen et al., ELECTRON-TRAPPING-TRIGGERED ANNEAL OF DEFECT STATES IN SILICON-RICH HYDROGENATED AMORPHOUS-SILICON NITRIDE, Journal of applied physics, 82(1), 1997, pp. 281-285
Citation: G. Oversluizen et al., PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION OF AMORPHOUS-SILICON NITRIDE FOR THIN-FILM DIODE ACTIVE-MATRIX LIQUID-CRYSTAL DISPLAYS, Thin solid films, 241(1-2), 1994, pp. 287-290