Authors:
JOHNSON FS
HARRIS GS
WORTMAN JJ
OZTURK MC
Citation: Fs. Johnson et al., IIA-1 SELF-ALIGNED BJTS FOR VLSI USING A NEW DIFFUSION TECHNIQUE FOR SHALLOW BASE FORMATION, I.E.E.E. transactions on electron devices, 40(11), 1993, pp. 2099-2100
Citation: Mk. Sanganeria et al., LOW-TEMPERATURE SILICON EPITAXY IN AN ULTRAHIGH-VACUUM RAPID THERMAL CHEMICAL-VAPOR-DEPOSITION REACTOR USING DISILANE, Applied physics letters, 63(9), 1993, pp. 1225-1227