Authors:
Une, A
Kai, Y
Mochida, M
Matsui, S
Ohira, F
Citation: A. Une et al., Influence of wafer chucking on focus margin for resolving fine patterns inoptical lithography, MICROEL ENG, 53(1-4), 2000, pp. 137-140
Authors:
Katagiri, Y
Aida, K
Tachikawa, Y
Nagaoka, S
Abe, H
Ohira, F
Citation: Y. Katagiri et al., High-accuracy laser-wavelength detection using a synchro-scanned optical disk filter, IEEE PHOTON, 11(1), 1999, pp. 102-104