Authors:
Shaginyan, LR
Onoprienko, AA
Britun, VF
Smirnov, VP
Citation: Lr. Shaginyan et al., Influence of different physical factors on microstructure and properties of magnetron sputtered amorphous carbon films, THIN SOL FI, 397(1-2), 2001, pp. 288-295
Authors:
Jastrabik, L
Soukup, L
Shaginyan, LR
Onoprienko, AA
Citation: L. Jastrabik et al., Deposition conditions and composition and structure relationships for nitride carbon films obtained by ECR plasma-assisted CVD and reactive rf magnetron sputtering, SURF COAT, 123(2-3), 2000, pp. 261-267
Authors:
Shaginyan, LR
Onoprienko, AA
Vereschaka, VM
Fendrych, F
Vysotsky, VG
Citation: Lr. Shaginyan et al., Role of ion bombardment in forming CNx and CNxHy films deposited by r.f.-magnetron reactive sputtering and ECR plasma-activated CVD methods, SURF COAT, 113(1-2), 1999, pp. 134-139