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Citation: L. Jastrabik et al., Deposition conditions and composition and structure relationships for nitride carbon films obtained by ECR plasma-assisted CVD and reactive rf magnetron sputtering, SURF COAT, 123(2-3), 2000, pp. 261-267

Authors: Shaginyan, LR Onoprienko, AA Vereschaka, VM Fendrych, F Vysotsky, VG

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