Authors: Richter, K Orfert, M Schuhrer, H

Citation: K. Richter et al., Variation of etch profile and surface properties during patterning of silicon substrates, SURF COAT, 142, 2001, pp. 797-802

Authors: Richter, K Orfert, M Howitz, S Thierbach, S

Citation: K. Richter et al., Deep plasma silicon etch for microfluidic applications, SURF COAT, 119, 1999, pp. 461-467

Authors: Orfert, M Richter, K

Citation: M. Orfert et K. Richter, Plasma enhanced chemical vapor deposition of SiN-films for passivation of three-dimensional substrates, SURF COAT, 119, 1999, pp. 622-628