Authors: Guyaux, JL Ortion, JM Cordier, Y Kappers, M Chirlias, E Garcia, JC

Citation: Jl. Guyaux et al., Kinetics of AsCl3 chemical beam etching of GaAs(001), (111)A and (111)B surfaces, J CRYST GR, 202, 1999, pp. 614-618