Authors: PANDY A LANDSBERGER LM NIKPOUR B PARANJAPE M KAHRIZI M

Citation: A. Pandy et al., EXPERIMENTAL INVESTIGATION OF HIGH SI AL SELECTIVITY DURING ANISOTROPIC ETCHING IN TETRA-METHYL AMMONIUM HYDROXIDE/, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(2), 1998, pp. 868-872