Authors:
JEAN A
ELKHAKANI MA
CHAKER M
GAT E
DODIER J
PAPADOPOULLOS A
LAFONTAINE H
PEPIN H
KIEFFER JC
RAVET MF
MADOURI A
BOURNEIX J
ROUSSEAUX F
GUJRATHI SC
Citation: A. Jean et al., MECHANICAL-PROPERTIES OF SILICON-CARBIDE FILMS FOR X-RAY-LITHOGRAPHY APPLICATION, Canadian journal of physics, 70(10-11), 1992, pp. 834-837