Citation: B. Gong et al., HYDROGEN AND DISILANE ADSORPTION ON LOW-ENERGY ION-ROUGHENED SI(100), Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(3), 1998, pp. 1473-1477
Authors:
HESS G
RUSSELL M
GONG B
PARKINSON P
EKERDT JG
Citation: G. Hess et al., HYDROGEN DESORPTION FROM ION-ROUGHENED SI(100), Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(3), 1997, pp. 1129-1134