Authors: PATURAUD C FARGES G SAINTECATHERINE MC MACHET J

Citation: C. Paturaud et al., INFLUENCE OF PARTICLE ENERGIES ON THE PROPERTIES OF MAGNETRON-SPUTTERED TUNGSTEN FILMS, Surface & coatings technology, 98(1-3), 1998, pp. 1257-1261

Authors: PATURAUD C FARGES G CATHERINE MCS MACHET J

Citation: C. Paturaud et al., INFLUENCE OF SPUTTERING GASES ON THE PROPERTIES OF MAGNETRON-SPUTTERED TUNGSTEN FILMS, Surface & coatings technology, 87-8(1-3), 1996, pp. 388-393