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Results:
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Results: 5
ADVANCED ARF EXCIMER-LASER FOR 193 NM LITHOGRAPHY
Authors:
LINDNER R STAMM U PATZEL R BASTING D
Citation:
R. Lindner et al., ADVANCED ARF EXCIMER-LASER FOR 193 NM LITHOGRAPHY, Microelectronic engineering, 42, 1998, pp. 75-78
EXCIMER-LASER WITH HIGH-REPETITION-RATE FOR DUV LITHOGRAPHY
Authors:
PATZEL R BRAGIN I KLEINSCHMIDT J REBHAN U BASTING D
Citation:
R. Patzel et al., EXCIMER-LASER WITH HIGH-REPETITION-RATE FOR DUV LITHOGRAPHY, Microelectronic engineering, 30(1-4), 1996, pp. 165-167
NEW KRF AND ARF EXCIMER LASERS FOR ADVANCED DEEP-ULTRAVIOLET OPTICAL LITHOGRAPHY
Authors:
ENDERT H PATZEL R REBHAN U POWELL M BASTING D
Citation:
H. Endert et al., NEW KRF AND ARF EXCIMER LASERS FOR ADVANCED DEEP-ULTRAVIOLET OPTICAL LITHOGRAPHY, JPN J A P 1, 34(8A), 1995, pp. 4050-4054
EXCIMER-LASER - A NEW TOOL FOR PRECISION MICROMACHINING
Authors:
ENDERT H PATZEL R BASTING D
Citation:
H. Endert et al., EXCIMER-LASER - A NEW TOOL FOR PRECISION MICROMACHINING, Optical and quantum electronics, 27(12), 1995, pp. 1319-1335
NEW KRF AND ARF EXCIMER-LASER FOR ADVANCED DUV LITHOGRAPHY
Authors:
ENDERT H PATZEL R POWELL M REBHAN U BASTING D
Citation:
H. Endert et al., NEW KRF AND ARF EXCIMER-LASER FOR ADVANCED DUV LITHOGRAPHY, Microelectronic engineering, 27(1-4), 1995, pp. 221-224
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