Authors: MEYER JA KIRMSE KHR JENG JS PEREZMONTERO SY MAYNARD HL WENDT AE TAYLOR JW HERSHKOWITZ N

Citation: Ja. Meyer et al., EXPERIMENTS WITH BACK SIDE GAS-COOLING USING AN ELECTROSTATIC WAFER HOLDER IN AN ELECTRON-CYCLOTRON-RESONANCE ETCHING TOOL, Applied physics letters, 64(15), 1994, pp. 1926-1928