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NOVEL-APPROACH TO DEFECT ETCHING IN THIN-FILM SILICON-ON-INSULATOR
Authors:
GASSEL H PETERWEIDEMANN J VOGT H
Citation:
H. Gassel et al., NOVEL-APPROACH TO DEFECT ETCHING IN THIN-FILM SILICON-ON-INSULATOR, Journal of the Electrochemical Society, 140(6), 1993, pp. 1713-1716
Risultati:
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