Authors: PETILLO JJ MONDELLI AA

Citation: Jj. Petillo et Aa. Mondelli, GLOBAL AND STOCHASTIC SPACE-CHARGE EFFECTS IN ION-BEAM LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 2409-2413

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Citation: A. Chalupka et al., NOVEL ELECTROSTATIC COLUMN FOR ION PROJECTION LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3513-3517