Authors:
GALAYEV AA
PARKHOMENKO YN
CHTCHERBATCHEV KD
PODGORNY DA
BELOGOROHOV AI
DIEGUEZ A
ROMANORODRIGUEZ A
PEREZRODRIGUEZ A
MORANTE JR
Citation: Aa. Galayev et al., STRUCTURAL-ANALYSIS OF BURIED CONDUCTING COSI2 LAYERS FORMED IN SI BYHIGH-DOSE CO ION-IMPLANTATION, Journal of crystal growth, 187(3-4), 1998, pp. 435-443