Login
|
New Account
AAAAAA
ITA
ENG
Results:
1-1
|
Results: 1
DIELECTRIC ETCHING FOR 0.18 MU-M TECHNOLOGIES
Authors:
BERRUYER P VINET F FELDIS H BLANC R LERME M MORAND Y POIROUX T
Citation:
P. Berruyer et al., DIELECTRIC ETCHING FOR 0.18 MU-M TECHNOLOGIES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(3), 1998, pp. 1604-1608
Risultati:
1-1
|