Authors:
RADZIMSKI ZJ
POSADOWSKI WM
ROSSNAGEL SM
SHINGUBARA S
Citation: Zj. Radzimski et al., DIRECTIONAL COPPER DEPOSITION USING DC MAGNETRON SELF-SPUTTERING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(3), 1998, pp. 1102-1106
Citation: Wm. Posadowski et Zj. Radzimski, SUSTAINED SELF-SPUTTERING USING A DIRECT-CURRENT MAGNETRON SOURCE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 11(6), 1993, pp. 2980-2984