Authors: DIFABRIZIO E GRELLA L LUCIANI L GENTILI M BACIOCCHI M FIGLIOMENI M MASTROGIACOMO L MAGGIORA R LEONARD Q CERRINA F MOLINO M POWDERLY D

Citation: E. Difabrizio et al., METROLOGY OF HIGH-RESOLUTION RESIST STRUCTURES ON INSULATING SUBSTRATES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2456-2462