Authors:
Tashtoush, A
Landsberger, LM
Essalik, A
Kahrizi, M
Paranjape, M
Currie, JF
Pandy, A
Citation: A. Tashtoush et al., Experimental characterization of the Si/Al/tetramethylammonium hydroxide system, J ELCHEM SO, 148(7), 2001, pp. C456-C460
Authors:
Paranjape, M
Pandy, A
Brida, S
Landsberger, L
Kahrizi, M
Zen, M
Citation: M. Paranjape et al., Dual-doped TMAH silicon etchant for microelectromechanical structures and systems applications, J VAC SCI A, 18(2), 2000, pp. 738-742