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Results: 2
Silicon-compatible waveguides used for an integrated opto-mechanical pressure sensor
Authors:
Muller, R Obreja, P Banu, V Pavelescu, I Dascalu, D
Citation:
R. Muller et al., Silicon-compatible waveguides used for an integrated opto-mechanical pressure sensor, OPT MATER, 17(1-2), 2001, pp. 255-258
Technological processes and modeling of opto-electromechanical microstructures
Authors:
Muller, R Poladian, VM Pavelescu, I Manea, E Cristea, D Obreja, P
Citation:
R. Muller et al., Technological processes and modeling of opto-electromechanical microstructures, MAT SC S PR, 3(5-6), 2000, pp. 427-431
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