Authors:
Balasubramanian, N
Johnson, E
Peidous, IV
Ming, S
Sundaresan, R
Citation: N. Balasubramanian et al., Active corner engineering in the process integration for shallow trench isolation, J VAC SCI B, 18(2), 2000, pp. 700-705
Citation: Kv. Loiko et al., Experimental study of Si3N4 viscosity for calibration of stress-dependent models of silicon oxidation, J ELCHEM SO, 146(11), 1999, pp. 4226-4229