Authors: Xia, LQ Nemani, S Galiano, M Pichai, S Chandran, S Yieh, E Cote, D Conti, R Restaino, D Tobben, D

Citation: Lq. Xia et al., High temperature subatmospheric chemical vapor deposited undoped silicate glass - A solution for next generation shallow trench isolation, J ELCHEM SO, 146(3), 1999, pp. 1181-1185