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Results: 1-2 |
Results: 2
End-point detection of polymer etching using Langmuir probes
Authors: de Castro, RM Verdonck, P Pisani, MB Mansano, RD Cirino, GA Maciel, HS Massi, M
Citation: Rm. De Castro et al., End-point detection of polymer etching using Langmuir probes, IEEE PLAS S, 28(3), 2000, pp. 1043-1049
A comparative study of single and double Langmuir probe techniques for RF plasma characterization
Authors: Castro, RM Cirino, GA Verdonck, P Maciel, HS Massi, M Pisani, MB Mansano, RD
Citation: Rm. Castro et al., A comparative study of single and double Langmuir probe techniques for RF plasma characterization, CONTR PLASM, 39(3), 1999, pp. 235-246
Risultati: 1-2 |