Citation: Jm. Plitzko et J. Mayer, Quantitative thin film analysis by energy filtering transmission electron microscopy, ULTRAMICROS, 78(1-4), 1999, pp. 207-219
Authors:
Marien, J
Plitzko, JM
Spolenak, R
Keller, RM
Mayer, J
Citation: J. Marien et al., Quantitative electron spectroscopic imaging studies of microelectronic metallization layers, J MICROSC O, 194, 1999, pp. 71-78