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Results: 4
Microfabrication of thermoelectric generators on flexible foil substrates as a power source for autonomous microsystems
Authors:
Qu, WM Plotner, M Fischer, WJ
Citation:
Wm. Qu et al., Microfabrication of thermoelectric generators on flexible foil substrates as a power source for autonomous microsystems, J MICROM M, 11(2), 2001, pp. 146-152
Endpoint detection method for CMP of copper
Authors:
Zeidler, D Plotner, M Drescher, K
Citation:
D. Zeidler et al., Endpoint detection method for CMP of copper, MICROEL ENG, 50(1-4), 2000, pp. 411-416
Photocrosslinking of thin films of temperature-sensitive polymers
Authors:
Kuckling, D Adler, HJP Arndt, KF Hoffmann, J Plotner, M Wolff, T
Citation:
D. Kuckling et al., Photocrosslinking of thin films of temperature-sensitive polymers, POLYM ADV T, 10(6), 1999, pp. 345-352
Photopatterning of thermally sensitive hydrogels useful for microactuators
Authors:
Hoffmann, J Plotner, M Kuckling, D Fischer, WJ
Citation:
J. Hoffmann et al., Photopatterning of thermally sensitive hydrogels useful for microactuators, SENS ACTU-A, 77(2), 1999, pp. 139-144
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