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Results: 1
Behavior of thin Ta-based films in the Cu/barrier/Si system
Authors:
Stavrev, M Fischer, D Praessler, F Wenzel, C Drescher, K
Citation:
M. Stavrev et al., Behavior of thin Ta-based films in the Cu/barrier/Si system, J VAC SCI A, 17(3), 1999, pp. 993-1001
Risultati:
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