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Development of SiNx LPCVD processes for microtechnological applications
Authors:
Rousset, B Furgal, L Fadel, P Fulop, A Pujos, D Temple-Boyer, P
Citation:
B. Rousset et al., Development of SiNx LPCVD processes for microtechnological applications, J PHYS IV, 11(PR3), 2001, pp. 937-944
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