Authors: HERSHKOWITZ N DING J BREUN RA CHEN RTS MEYER J QUICK AK

Citation: N. Hershkowitz et al., DOES HIGH-DENSITY LOW-PRESSURE ETCHING DEPEND ON THE TYPE OF PLASMA SOURCE, Physics of plasmas, 3(5), 1996, pp. 2197-2202

Authors: QUICK AK CHEN RTS HERSHKOWITZ N

Citation: Ak. Quick et al., ETCH RATE AND PLASMA-DENSITY RADIAL UNIFORMITY MEASUREMENTS IN A CUSPED FIELD HELICON PLASMA ETCHER, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(3), 1996, pp. 1041-1045