Authors: QUIGLEY PG RAO RA EOM CB

Citation: Pg. Quigley et al., TIME-DEPENDENCE AND SPATIAL-DISTRIBUTION OF THE DEPOSITION RATE OF YBA2CU3O7 THIN-FILMS IN 90-DEGREES OFF-AXIS SPUTTERING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2854-2858