Authors: Christophersen, M Merz, P Quenzer, J Carstensen, J Foll, H

Citation: M. Christophersen et al., Deep electrochemical trench etching with organic hydrofluoric electrolytes, SENS ACTU-A, 88(3), 2001, pp. 241-246

Authors: Christophersen, M Merz, P Quenzer, J Carstensen, J Foll, H

Citation: M. Christophersen et al., A new way to silicon microstructuring with electrochemical etching, PHYS ST S-A, 182(1), 2000, pp. 561-566