Authors: Quere, Y

Citation: Y. Quere, The virtues of a scientific education, NUCL INST B, 164, 2000, pp. 23-26

Authors: Trouiller, Y Didiergeorges, A Buffet, N Mourier, T Laviron, C Quere, Y

Citation: Y. Trouiller et al., Surface treatment validation of inorganic BARC on 0.25 mu m Non Volatile Memory technology, MICROEL ENG, 46(1-4), 1999, pp. 47-50

Authors: Trouiller, Y Buffet, N Mourier, T Schiavone, P Quere, Y

Citation: Y. Trouiller et al., 0.12 mu m optical lithography performances using an alternating deep UV phase shift mask, JPN J A P 1, 37(12B), 1998, pp. 6714-6717

Authors: Tedesco, S Mourier, T Dal'zotto, B McDougall, A Blanc-Coquant, S Quere, Y Paniez, PJ Mortini, B

Citation: S. Tedesco et al., Resist processes for hybrid (electron-beam deep ultraviolet) lithography, J VAC SCI B, 16(6), 1998, pp. 3676-3683